Dual-Frequency Microwave Plasma Source Based on Microwave Coaxial Transmission Line

نویسندگان

چکیده

A dual-frequency plasma source has many advantages in applications. In this paper, a microwave is presented. This based on coaxial transmission line without the resonator, and it can be operated wide band frequency region. Two microwaves are inputted from two ports into reactor: one used firstly to excite other adjust characteristics. Based COMSOL Multiphysics simulation, experiment carried out. experimental investigation, electron density temperature controlled, respectively, by feeding different frequencies second port, causing particles at energy levels present frequencies. exploratory research improves operation of sources RF microwave.

برای دانلود باید عضویت طلایی داشته باشید

برای دانلود متن کامل این مقاله و بیش از 32 میلیون مقاله دیگر ابتدا ثبت نام کنید

اگر عضو سایت هستید لطفا وارد حساب کاربری خود شوید

منابع مشابه

Rainfall Intensity Estimation by Ground-Based Dual-Frequency Microwave Radiometers

Many investigators have used satellite data to derive rainfall intensity and to compare them with rain gauge data. However, there has always been a problem: what is the optimal time period for the two different types of data? A set of well-controlled data collected by ground-based dual-frequency microwave radiometers at the National Central University (24.98N, 121.18E) in Taiwan between January...

متن کامل

Investigations on a Novel Microwave Transmission Line Using Matlab

In this paper, a new type of waveguide structure has been investigated. The structure can be fabricated using printedcircuit techniques. The characteristic equations for the different modes of the structure have been derived and the dispersion characteristics have been obtained using MATLAB. The slow-wave nature of the structure, the cut-off behaviour of different modes, and the effects of vari...

متن کامل

MEMS-based transmission lines for microwave applications

This paper mainly presents a briefly review for recent progress in MEMS-based transmission lines for use in microwave and millimeterwave range. MEMS-based transmission lines including different transmission line structure such as membranesupported microstrip line microstrip line, coplanar microshield transmission line, LIGA micromachined planar transmission line, micromachined waveguides and co...

متن کامل

Study on Interstitial Microwave Hyperthermia with Multi-slot Coaxial Antenna

This study focuses attention on interstitial microwave hyperthermia, which is a popular medical procedure for treatment of pathological human tissues containing tumors. In the paper, the 2D finite element analysis is used to compare the models of the coaxial antenna with one, two and three air slots. The implemented models are based on the wave equation in the TM mode coupled with the Pennes eq...

متن کامل

ذخیره در منابع من


  با ذخیره ی این منبع در منابع من، دسترسی به آن را برای استفاده های بعدی آسان تر کنید

ژورنال

عنوان ژورنال: Applied sciences

سال: 2021

ISSN: ['2076-3417']

DOI: https://doi.org/10.3390/app11219873